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Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) By M. Elwenspoek, H. V. Jansen
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- Sales Rank: #5928356 in Books
- Brand: Brand: Cambridge University Press
- Published on: 2004-08-19
- Original language: English
- Number of items: 1
- Dimensions: 9.96" h x .87" w x 6.97" l, 1.67 pounds
- Binding: Paperback
- 420 pages
- Used Book in Good Condition
Review
'This book has many admirable properties. It covers the chosen subject in considerable detail and brings together much of the state-of-the-art. The illustrations and photographs are of very high quality and indeed the whole book is well presented. It will be useful to both the experienced engineer wishing to sort out a few problems in his own work and to those requiring an introduction to silicon microengineering' R. A. Lawes, Engineering Science and Education Journal
About the Author
Lord Broers is President of the Royal Academy of Engineering and Chairman of the House of Lords Science and Technology Committee. He spent nineteen years in the research and development laboratories of IBM in the USA and then twenty years at Cambridge University as Professor of Electrical Engineering, Master of Churchill College, Head of the Engineering Department, and Vice-Chancellor. In his research at Cambridge and at IBM, he pioneered the use of electron beams to write the patterns for silicon chips.
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